Control of polytype formation in silicon carbide heteroepitaxial films by pulsed-laser deposition

KUSUMORI T; MUTO H; BRITO M E

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J-GLOBAL ID：200902233048138868 Reference number：04A0151008

Control of polytype formation in silicon carbide heteroepitaxial films by pulsed-laser deposition

パルスレーザ蒸着による炭化けい素ヘテロエピタキシャル薄膜におけるポリタイプ形成の制御

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Author (3)： , ,
Material：
Volume： 84 Issue： 8 Page： 1272-1274 Publication year： Feb. 23, 2004
JST Material Number： H0613A ISSN： 0003-6951 CODEN： APPLAB Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Semiconductor thin films

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