Art
J-GLOBAL ID：200902233987562214
Reference number：04A0190081
Electron beam doping of impurity atoms into semiconductors by superdiffusion
超拡散による半導体中への不純物原子の電子ビームドーピング
Author (2)：
,
Material：
Page：
788-794
Publication year：
2003
JST Material Number：
K20030106
ISSN：
1610-1634
ISBN：
3-527-40435-X
Document type：
Proceedings
Article type：
短報
Country of issue：
Germany, Federal Republic of (DEU)
Language：
ENGLISH (EN)
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Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
JST classification (2)：
JST classification
Category name(code) classified by JST.
Lattice defects in semiconductors
, Diffusion in solids in general
Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
,
,
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