Art
J-GLOBAL ID：200902234867857250
Reference number：04A0634923
A nL/min-Scale Valveless Flow Regulator for Integrated Micro Chemical Devices
集積マイクロケミカルデバイスのためのナノリットル毎分オーダーのバルブレス型の流量調節素子
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Author (2)：
,
Material：
Volume：
47
Issue：
3
Page：
528-533
Publication year：
Aug. 15, 2004
JST Material Number：
X0904A
ISSN：
1340-8054
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Convective and radiative heat transfer
Reference (6)：
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XIE, J. Integrated Surface-Micromachined Mass Flow Controller. IEEE MEMS 2003. 2003, 20-23
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HENNING, A. K. A Thermopneumatically Actuated Microvalve for Liquid Expansion and Proportional Control. TRANSDUCERS '97. 1997, 825-828
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SCHULZ, T. Miniaturized Electricaloric Flow Controller for Analyte Multiplexing and Cell/Particle Sorting. Proc. μTAS '98. 1998, 303-306
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MATSUMOTO, S. Development of Bi-Directional Valve-Less Micropump for Liquid. IEEE MEMS '99. 1999, 141-146
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WU, S. MEMS Flow Sensor for Nano-Fluidic Applications. IEEE MEMS 2000. 2000, 23-27
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