Art
J-GLOBAL ID:200902234933694910   Reference number:05A0610034

300NM-THICK CANTILEVER IN PDMS FOR TACTILE SENSING

触覚感知のためのPDMSにおける300ナノメータ厚さの片持梁
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Material:
Volume: 18th  Page: 283-286  Publication year: 2005 
JST Material Number: W0377A  ISSN: 1084-6999  Document type: Proceedings
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Measuring methods and instruments of force,work load,pressure,friction  ,  Manufacturing technology of solid-state devices 
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