A study on focused ion beam milling of glassy carbon molds for the thermal imprinting of quartz and borosilicate glasses

YOUN Sung Won; TAKAHASHI Masaharu; GOTO Hiroshi; MAEDA Ryutaro

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J-GLOBAL ID：200902236071230479 Reference number：07A0033091

A study on focused ion beam milling of glassy carbon molds for the thermal imprinting of quartz and borosilicate glasses

石英ガラスとほうけい酸ガラスの熱インプリント用のガラス状カーボンモールドの集束イオンビームミリング加工に関する研究

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Material：
Volume： 16 Issue： 12 Page： 2576-2584 Publication year： Dec. 2006
JST Material Number： W1424A ISSN： 0960-1317 CODEN： JMMIEZ Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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