Art
J-GLOBAL ID：200902237139639679   Reference number：07A1130529

Fabrication of Ferroelectric Microstructures by Electron-Beam-Induced Patterning Process

電子ビームによるパターン形成プロセスによる強誘電体微細構造の形成
Author (3)：
FUJII Tadashi

About FUJII Tadashi

(Toyama Prefectural Univ. Imizu, Toyama, JPN)

About Toyama Prefectural Univ. Imizu, Toyama, JPN

, 
NAKATA Kazuhisa

About NAKATA Kazuhisa

(Toyama Prefectural Univ. Imizu, Toyama, JPN)

About Toyama Prefectural Univ. Imizu, Toyama, JPN

, 
ADACHI Masatoshi

About ADACHI Masatoshi

(Toyama Prefectural Univ. Imizu, Toyama, JPN)

About Toyama Prefectural Univ. Imizu, Toyama, JPN


Material：
Ferroelectrics

About Ferroelectrics


Volume： 356  Page： 545-549,563-564  Publication year： Oct. 2007 
JST Material Number： D0777A  ISSN： 0015-0193  CODEN： FEROA8  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*ferroelectrics

About ferroelectrics

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
planar array antenna

About planar array antenna

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Ferroelectrics,antiferroelectrics and ferroelasticity 
(BM05030B)

About Ferroelectrics,antiferroelectrics and ferroelasticity

,  Oxide thin films 
(BK14050P)

About Oxide thin films

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
電子ビーム

About 電子ビーム

, 
形成プロセス

About 形成プロセス

, 
強誘電体

About 強誘電体

, 
微細構造

About 微細構造


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