Art
J-GLOBAL ID：200902240200844087   Reference number：08A0145747

INTERFACE RESISTIVITY ESTIMATION OF BONDED Si FOR HIGH PERFORMANCE RADIATION DETECTOR DEVELOPMENT

高性能放射線検出器開発に対するボンドしたSiの界面抵抗率の評価
Author (4)：
KANNO Ikuo

About KANNO Ikuo

(Kyoto Univ., Kyoto, JPN)

About Kyoto Univ., Kyoto, JPN

, 
YAMASHITA Makoto

About YAMASHITA Makoto

(Kyoto Univ., Kyoto, JPN)

About Kyoto Univ., Kyoto, JPN

, 
NOMIYA Seiichiro

About NOMIYA Seiichiro

(Raytech Corp., Utsunomiya, JPN)

About Raytech Corp., Utsunomiya, JPN

, 
ONABE Hideaki

About ONABE Hideaki

(Raytech Corp., Utsunomiya, JPN)

About Raytech Corp., Utsunomiya, JPN


Material：
KEK Proceedings  (KEK Proc)

About KEK Proceedings


Issue： 2007-12  Page： 11-20  Publication year： Dec. 2007 
JST Material Number： L1349A  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*Si semiconductor detector

About Si semiconductor detector

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Si wafer

About Si wafer

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Radiation detection and detectors 
(AD08020J)

About Radiation detection and detectors

,  Electric conduction in crystalline semiconductors 
(BM03043X)

About Electric conduction in crystalline semiconductors

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
高性能

About 高性能

, 
放射線検出器

About 放射線検出器

, 
開発

About 開発

, 
ボンド

About ボンド

, 
Si

About Si

, 
界面抵抗

About 界面抵抗

, 
評価

About 評価


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