Art
J-GLOBAL ID：200902240579933022
Reference number：05A0126430
Characterization of Lattice Distortions in (100) Silicon Crystals Using Grazing Incidence X-Ray Topography
微小角入射X線トポグラフィによる(100)Si表面の格子歪の観察と評価
Author (2)：
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Material：
Issue：
33
Page：
9-16
Publication year：
Oct. 25, 2004
JST Material Number：
G0471A
ISSN：
0540-4924
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
JAPANESE (JA)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films
, Surface structure of semiconductors
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