Art
J-GLOBAL ID:200902243112136705   Reference number:03A0393147

Multichannel 5×5-Site 3-Dimensional Si Microprobe Electrode Array for Neural Activity Recording System

神経活動認識系用多チャンネル5×5-位置3次元Siマイクロプローブ電極アレイ
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Material:
Volume: 42  Issue: 4B  Page: 2473-2477  Publication year: Apr. 30, 2003 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Biometry  ,  Manufacturing technology of solid-state devices 
Reference (5):
  • GINGERICH, M. D. Proc. 11th Int. Conf. Solid-State Sensors and Actuators. 2001, 416
  • BRANNER, A. J. Neurophysiol. 2001, 85, 1585
  • ISHIDA, M. Proc. 10th Int. Conf. Solid-State Sensors and Actuators. 1999, 866
  • WAGNER, R. S. Appl. Phys. Lett. 1964, 4, 89
  • KAWANO, T. Sens. & Actuat. A. 2002, 97-98, 709

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