Multichannel 5×5-Site 3-Dimensional Si Microprobe Electrode Array for Neural Activity Recording System

KAWANO T; TAKAO H; SAWADA K; ISHIDA M

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J-GLOBAL ID：200902243112136705 Reference number：03A0393147

Multichannel 5×5-Site 3-Dimensional Si Microprobe Electrode Array for Neural Activity Recording System

神経活動認識系用多チャンネル5×5-位置3次元Siマイクロプローブ電極アレイ

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Material：
Volume： 42 Issue： 4B Page： 2473-2477 Publication year： Apr. 30, 2003
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Biometry , Manufacturing technology of solid-state devices

Reference (5)：

GINGERICH, M. D. Proc. 11th Int. Conf. Solid-State Sensors and Actuators. 2001, 416
BRANNER, A. J. Neurophysiol. 2001, 85, 1585
ISHIDA, M. Proc. 10th Int. Conf. Solid-State Sensors and Actuators. 1999, 866
WAGNER, R. S. Appl. Phys. Lett. 1964, 4, 89
KAWANO, T. Sens. & Actuat. A. 2002, 97-98, 709

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