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J-GLOBAL ID：200902245595947370   Reference number：07A0169658

サブミリ波帯用超伝導ミキサ素子作製行程における超伝導薄膜のリアクティブエッチング

Author (1)：
ISHII KOICHI

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(木更津工高専)

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Material：
木更津工業高等専門学校紀要  (Bulletin of Kisarazu National Technical College)

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Issue： 40  Page： 13-18  Publication year： Jan. 31, 2007 
JST Material Number： S0774A  ISSN： 0285-7901  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*submillimeter wave

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,...
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反応性エッチング

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JST classification (2)：
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Other superconducting applications 
(BM04044V)

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,  Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (5)：
Terms in the title
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サブミリ波

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, 
超伝導ミキサ

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, 
作製

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, 
行程

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, 
超伝導薄膜

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