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J-GLOBAL ID:200902245595947370   Reference number:07A0169658

サブミリ波帯用超伝導ミキサ素子作製行程における超伝導薄膜のリアクティブエッチング

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Issue: 40  Page: 13-18  Publication year: Jan. 31, 2007 
JST Material Number: S0774A  ISSN: 0285-7901  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Other superconducting applications  ,  Manufacturing technology of solid-state devices 
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