Art
J-GLOBAL ID:200902247349824296   Reference number:09A1082485

PLD法による硫黄ドープチタン酸化物薄膜の合成と評価(その1)

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Material:
Volume: 62  Issue: 10  Page: 147-154  Publication year: Oct. 15, 2009 
JST Material Number: F0507A  ISSN: 0370-8047  CODEN: RYUSAZ  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Semiconductor thin films  ,  Materials of solid-state devices  ,  Oxide thin films 
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