Ion beam charging of silicon nanoparticles in helium background gas: Design of the ion beam aerosol charger

SETO T; ORII T; HIRASAWA M; AYA N; SHIMURA H

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J-GLOBAL ID：200902247919145509 Reference number：03A0443389

Ion beam charging of silicon nanoparticles in helium background gas: Design of the ion beam aerosol charger

ヘリウムバックグラウンドガスにおけるシリコンナノ粒子のイオンビーム帯電イオンビームエーロゾル帯電器の設計

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Material：
Volume： 74 Issue： 6 Page： 3027-3030 Publication year： Jun. 2003
JST Material Number： D0517A ISSN： 0034-6748 CODEN： RSINAK Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Applications of electron beams and ion beams , Applied physicochemical processes and equipment

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