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J-GLOBAL ID：200902248686092112   Reference number：06A0913782

Development of Three-Dimensional Microstages Driven by Comb Actuators (Evaluation of Basic Performance Using Atomic Force Microscope)

櫛歯型アクチュエータで駆動される3次元マイクロステージの開発(原子間力顕微鏡を用いた基本性能の評価)

Author (1)： ANDO YASUHISA (産業技術総合研 先進製造プロセス研究部門)
Material： 日本機械学会論文集 C編  (Transactions of the Japan Society of Mechanical Engineers. Series C)
Volume： 72  Issue： 722  Page： 3294-3301  Publication year： Oct. 25, 2006 
JST Material Number： F0045B  ISSN： 0387-5024  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： atomic force microscope ,...

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JST classification (2)： Electric control equipment  (IC02020Y) ,  Optical microscopes,telescopes  (QF05050R)

Reference (13)：

• HERSAM, M. C. Silicon-based Molecular Nanotechnology. Nanotechnology. 2000, 11, 2, 70-76
• ISHIDA, T. Scanning Tunneling Microscopy Study of Imaging Change Induced by Electric Field Change of Bipyridine Derivatives in Self-Assembled Monolayers. Japanese Journal of Applied Physics, B. 2004, Part 1, 43, 7, 4561-4565
• BINNING, G. Surface Studies by Scanning Tunneling Microscopy. Physical Review Letters. 1982, 49, 1, 57-61
• UCHIHASHI, T. Role of a Covalent Bonding Interaction in Noncontact-Mode Atomic-Force Microscopy on Si(111)7x7. Physical Review B. 1997, 56, 15, 9834-9840
• RUDNITSKY, RG. Rapid Biochemical Detection and Differentiation with Magnetic Force Microscope Cantilever Arrays. Sensors and Actuators A. 2000, 83, 1-3, 256-262

Terms in the title (8)： 櫛歯 ,  アクチュエータ ,  3次元 ,  マイクロ ,  ステージ ,  開発 ,  原子間力顕微鏡 ,  評価