Art
J-GLOBAL ID：200902249128805842   Reference number：04A0585919

The anti-pollution technology in semiconductor and FPD manufacturing processes. The latest trend of the clean air system in semiconductor and FPD manufacturing processes.

半導体・FPD製造工程におけるクリーン化技術 半導体・FPD製造工程におけるクリーンエアシステムの最新動向
Author (1)：
HIRASAWA SHIN'YA

About HIRASAWA SHIN'YA

(日本エアーテック)

About 日本エアーテック


Material：
電子材料  (Electronic Parts and Materials)

About 電子材料


Volume： 43  Issue： 8  Page： 18-24  Publication year： Aug. 01, 2004 
JST Material Number： F0040A  ISSN： 0387-0774  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*clean room

About clean room

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*flat-panel display

About flat-panel display

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Air purification 
(PC02060X)

About Air purification

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
FPD

About FPD

, 
製造工程

About 製造工程

, 
クリーン化技術

About クリーン化技術

, 
クリーンエア

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, 
最新動向

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