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J-GLOBAL ID：200902252032568395   Reference number：05A0518914

Effect of electron temperature on the DLC film properties

DLC薄膜の特性に及ぼす電子温度の影響

Author (5)： IKENAGA Noriaki (Japan Sci. and Technol. Corp., Ishikawa, JPN) ,  AWAZU Kaoru (Industrial Res. Inst. of Ishikawa, Ishikawa, JPN) ,  SAKUDO Noriyuki (Kanazawa Inst. of Technol., Ishikawa, JPN) ,  YASUI Haruyuki (Industrial Res. Inst. of Ishikawa, Ishikawa, JPN) ,  KAWABATA Takeshi (Japan Sci. and Technol. Corp., Ishikawa, JPN)
Material： Surface & Coatings Technology  (Surf Coat Technol)
Volume： 196  Issue： 1/3  Page： 226-230  Publication year： Jun. 22, 2005 
JST Material Number： D0205C  ISSN： 0257-8972  Document type： Article
Article type： 短報  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *DLC film ,...

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JST classification (2)： Carbon and its compounds  (YB02060D) ,  Thin films of other inorganic compounds  (BK14060A)

Substance index (1)： Acetylene

Terms in the title (2)： DLC薄膜 ,  電子温度