Large-Area Nanoscale Patterning: Chemistry Meets Fabrication

HENZIE Joel; BARTON Jeremy E.; STENDER Christopher L.; ODOM Teri W.

Art

J-GLOBAL ID：200902253552170285 Reference number：07A0364010

Large-Area Nanoscale Patterning: Chemistry Meets Fabrication

大面積ナノスケールパターニング:化学が加工に合致する

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Author (4)： , , ,
Material：
Volume： 39 Issue： 4 Page： 249-257 Publication year： Apr. 2006
JST Material Number： B0966A ISSN： 0001-4842 CODEN： ACHRE4 Document type： Article
Article type：文献レビュー Country of issue： United States (USA) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices , Crystal growth of oxides , Press working , X-ray instruments and techniques

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