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J-GLOBAL ID:200902254164179277   Reference number:07A0027031

Constant-Magnification Varifocal Mirror and Its Application to Measuring Three-Dimensional (3-D) Shape of Solder Bump

定倍率可変焦点距離反射鏡とそのはんだバンプの3次元形状の測定への応用
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Volume: E90-C  Issue:Page: 6-11  Publication year: Jan. 01, 2007 
JST Material Number: L1370A  ISSN: 0916-8524  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Measurement,testing and reliability of solid-state devices 
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