The role of Triton surfactant in anisotropic etching of {1 1 0} reflective planes on (1 0 0) silicon

RESNIK Drago; VRTACNIK Danilo; ALJANCIC Uros; MOZEK Matej; AMON Slavko

Art

J-GLOBAL ID：200902255321728340 Reference number：05A0607335

The role of Triton surfactant in anisotropic etching of {1 1 0} reflective planes on (1 0 0) silicon

(100)シリコン上の{110}反射面の異方性エッチングにおけるTriton界面活性剤の役割

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Material：
Volume： 15 Issue： 6 Page： 1174-1183 Publication year： Jun. 2005
JST Material Number： W1424A ISSN： 0960-1317 CODEN： JMMIEZ Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices , Other surface treatment

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