RECENT DEVELOPMENTS IN NUCLEAR METHODS IN SUPPORT OF SEMICONDUCTOR CHARACTERIZATION

BRIJS B; BENDER H; HUYGHEBAERT C; JANSSENS T; NAKAJIMA K; KIMURA K; BERGMAIER A; DOLLINGER G; VAN DEN BERG J A

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J-GLOBAL ID：200902255529340443 Reference number：04A0219753

RECENT DEVELOPMENTS IN NUCLEAR METHODS IN SUPPORT OF SEMICONDUCTOR CHARACTERIZATION

半導体評価支援のための原子核法の最近の発展

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Material：
Volume： 5133 Page： 50-62 Publication year： 2003
JST Material Number： D0943A ISSN： 0277-786X CODEN： PSISDG Document type： Proceedings
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Measurement,testing and reliability of solid-state devices , Experimental techniques of observation of lattice defects

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