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J-GLOBAL ID:200902255650275713   Reference number:05A0930921

Pressure Response of Aluminum Nitride Thin Film Prepared on Silicon Substrates

シリコン基板上に作製した配向性AlN薄膜の圧力応答性
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Volume: 113  Issue: 1322  Page: 700-702  Publication year: Oct. 01, 2005 
JST Material Number: F0382A  ISSN: 0914-5400  CODEN: JCSJEW  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Ceramic coating to nonmetallic materials  ,  Measuring methods and instruments of force,work load,pressure,friction 
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