Art
J-GLOBAL ID:200902257872637926
Reference number:06A0128713
Wear-out of Al-Ta2O5/SiO2-Si structures under dynamic stress
動的ストレス下でのAl-Ta2O5/SiO2-Si構造の細り
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Author (2):
,
Material:
Volume:
252
Issue:
10
Page:
3833-3836
Publication year:
Mar. 15, 2006
JST Material Number:
B0707B
ISSN:
0169-4332
Document type:
Article
Article type:
原著論文
Country of issue:
Netherlands (NLD)
Language:
ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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JST classification (2):
JST classification
Category name(code) classified by JST.
Metal-insulator-semiconductor structures
, Oxide thin films
Terms in the title (5):
Terms in the title
Keywords automatically extracted from the title.
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