Art
J-GLOBAL ID：200902258529071506   Reference number：07A0334355

セラミック窒化物薄膜の微小硬度および微細構造変化

Author (3)：
HASEGAWA HIROYUKI

About HASEGAWA HIROYUKI

(岡山大 大学院)

About 岡山大 大学院

, 
TSUKAMOTO SHIN'YA

About TSUKAMOTO SHIN'YA

(岡山大 大学院)

About 岡山大 大学院

, 
SUZUKI TETSUYA

About SUZUKI TETSUYA

(慶応大 大学院)

About 慶応大 大学院


Material：
高温学会誌  (Journal of High Temperature Society)

About 高温学会誌


Volume： 33  Issue： 2  Page： 78-83  Publication year： Mar. 20, 2007 
JST Material Number： F0907B  ISSN： 0387-1096  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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thin film

About thin film

,...
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Thesaurus term/Semi thesaurus term
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*arc ion plating

About arc ion plating

,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Vapor plating 
(WC08022K)

About Vapor plating

,  Ceramic coating to metallic materials 
(YC02050V)

About Ceramic coating to metallic materials

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
セラミック

About セラミック

, 
窒化物

About 窒化物

, 
薄膜

About 薄膜

, 
微小硬度

About 微小硬度

, 
微細構造

About 微細構造


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