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J-GLOBAL ID:200902258604069385   Reference number:06A0288948

High-Speed Fabrication of Super-Resolution Near-Field Structure Read-Only Memory Master Disc using PtOx Thermal Decomposition Lithography

PtOx熱分解リソグラフィーを使用する超分解能近傍場構造リード・オンリー・メモリー・マスターディスクの高速製造
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Volume: 45  Issue: 2B  Page: 1379-1382  Publication year: Feb. 28, 2006 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 短報  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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