Art
J-GLOBAL ID:200902259136386544   Reference number:03A0506855

Fabrication of SiC Lateral Super Junction Diodes With Multiple Stacking p- and n-Layers

pとn層を多重スタックしたSiC横型超接合ダイオードの作製
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Material:
Volume: 24  Issue:Page: 321-323  Publication year: May. 2003 
JST Material Number: B0344B  ISSN: 0741-3106  CODEN: EDLEDZ  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Diodes 
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