Art

J-GLOBAL ID：200902259838966743   Reference number：05A0367330

Mechanical Reliability in MENS

MEMSの機械的信頼性

Author (1)： TSUCHIYA TOSHIYUKI (京大 大学院)
Material： 日本信頼性学会誌  (REAJ誌)
Volume： 27  Issue： 2  Page： 105-112  Publication year： Apr. 01, 2005 
JST Material Number： L2778A  ISSN： 0919-2697  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： semiconductor process ,...

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JST classification (2)： Reliability  (KB04040H) ,  Measurement,testing and reliability of solid-state devices  (NC03040G)

Reference (17)：

• 1) TSUCHIYA T. Tensile testing of thin films using electrostatic force grip. ASTM STP 1413 : Mechanical Properties of Structural Films. (2001)
• 2) TSUCHIYA T. Tensile Test of Bulk- and Surface-Micromachined 0.1-μm Thick Silicon Film using Electrostatic Force Grip System. Material Research Society Symposium Proceedings, Boston, MA, Nov. 26-30, 2001. (2001)
• 3) TSUCHIYA T. Tensile strength and fracture toughness of surface micromachined polycrystalline silicon thin films prepared under various conditions. Material Research Society Symposium Proceedings, Boston, MA, Dec. 2-5, 1997. (1997) vol.505, p.285-290.
• 4) MUTOH M. Development of Integrated Semiconductor-Type Acceleration. Proc. of 1990 IEEE Workshop on Electronic Applications in Transportation. (1990)
• 5) HOWE R. T. Resonant-microbridge vapor sensor. IEEE Tran. on Electron Device. (1986) vol.ED-33, p.499-506.

Terms in the title (1)： MEMS