Thermal Anemometer Using Micro-Air-Bridge Heater with Chip Scale Wind Tunnel

YASAKA S.; MITSUHASHI M.; KANEKO S.; ITO T.; OHYA S.; KANNO Y.; AIKYO Y.; KOMURO S.; OHBAYASHI K.; KIMURA M.

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J-GLOBAL ID：200902263085850884 Reference number：05A0958373

Thermal Anemometer Using Micro-Air-Bridge Heater with Chip Scale Wind Tunnel

チップ・スケール風洞付きのマイクロ・エアブリッジ・ヒーターを使った熱式風速計

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Material：
Volume： 22nd Page： 143-146 Publication year： Oct. 20, 2005
JST Material Number： X0768A Document type： Proceedings
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Meteorology in general , Manufacturing technology of solid-state devices

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