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J-GLOBAL ID：200902263798998997   Reference number：04A0255431

Theoretical Analysis of Elastic Modulus and Dielectric Constant for Low-k Two-Dimensional Periodic Porous Silica Films

低k二次元周期多孔質シリカ膜における弾性定数と誘電率の理論解析

Author (9)： MIYOSHI H (Assoc. Super-Advanced Electronics Technol. (ASET), Ibaraki, JPN) ,  MATSUO H (Assoc. Super-Advanced Electronics Technol. (ASET), Ibaraki, JPN) ,  OKU Y (Assoc. Super-Advanced Electronics Technol. (ASET), Ibaraki, JPN) ,  TANAKA H (Assoc. Super-Advanced Electronics Technol. (ASET), Ibaraki, JPN) ,  YAMADA K (Assoc. Super-Advanced Electronics Technol. (ASET), Ibaraki, JPN) ,  MIKAMI N (Assoc. Super-Advanced Electronics Technol. (ASET), Ibaraki, JPN) ,  TAKADA S (National Inst. Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  HATA N (National Inst. Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  KIKKAWA T (Assoc. Super-Advanced Electronics Technol. (ASET), Ibaraki, JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 43  Issue： 2  Page： 498-503  Publication year： Feb. 15, 2004 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： interlayer dielectric ,...
Semi thesaurus term： *silica ,...

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JST classification (2)： Materials of solid-state devices  (NC03020K) ,  Dielectrics in general  (BM05010F)

Reference (41)：

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• 2) R. D. Miller: Science 286 (1999) 421.
• 3) A. Jain, S. Rogojevic, W. N. Gill, J. L. Plawsky, I. Matthew, M. Tomozawa and E. Simonyi: J. Appl. Phys. 90 (2001) 5832.
• 4) C. M. Flannery, T. Wittkowski, K. Jung, B. Hillebrands and M. R. Baklanov: Appl. Phys. Lett. 80 (2002) 4594.
• 5) S. Lin, C. Jin, L. Lui, M. Tsai, M. Daniels, A. Gonzalez, J. T. Wetzel, K. A. Monning, P. A. Winebarger, S. Jang, D. Yu and M. S. Liang: Proc. 2001 Int. Interconnect Technology Conf., San Francisco, 2001 (IEEE Press, New Jersey, 2001) p. 146.

Terms in the title (6)： 周期 ,  多孔質 ,  シリカ膜 ,  弾性定数 ,  誘電率 ,  理論解析