Art
J-GLOBAL ID:200902264619412272   Reference number:05A0521718

Inelastic interactions of slow ions and atoms with surfaces

表面を使った低速イオンと原子の非弾性相互作用
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Volume: 233  Issue: 1-4  Page: 111-124  Publication year: May. 2005 
JST Material Number: H0899A  ISSN: 0168-583X  Document type: Article
Article type: 文献レビュー  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Sputtering 
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