About YAMAMOTO HIROSHI
About TAKEDA KEIGO
About SEKINE MAKOTO
About SEKINE MAKOTO
About JST-CREST
About HORI MASARU
About HORI MASARU
About JST-CREST
About KAMINATSUI TAKESHI
About 東芝 セミコン社
About YAMAMOTO KATSUMI
About 東芝 セミコン社
About HAYASHI HISATAKA
About 東芝 セミコン社
About SAKAI ITSUKO
About 東芝 セミコン社
About OIWA TOKUHISA
About 東芝 セミコン社
About 応用物理学会学術講演会講演予稿集
About porosity(property)
About oxide
About carbide
About silicide
About hydride
About dielectric thin film
About Fourier transform infrared spectrophotometry
About ellipsometry
About plasma exposure
About refractive index
About radical
About photoirradiation
About ion irradiation
About amorphous state
About damage and injury
About hydrogen
About nitrogen
About low-dielectric-constant film
About Solid-plasma interactions
About Interactions with ions
About Photochemistry in general
About ポーラス
About low-k膜
About H2
About N2