Cubic Aluminum Nitride Transformed Under Reduced Pressure Using Aerosol Deposition Method

IWATA Atsushi; AKEDO Jun; LEBEDEV Maxim

Art

J-GLOBAL ID：200902265371311829 Reference number：05A0434874

Cubic Aluminum Nitride Transformed Under Reduced Pressure Using Aerosol Deposition Method

エーロゾル析出法を使って減圧下に変態した立方晶窒化アルミニウム

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Author (3)： , ,
Material：
Volume： 88 Issue： 4 Page： 1067-1069 Publication year： Apr. 2005
JST Material Number： C0253A ISSN： 0002-7820 CODEN： JACTAW Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Solid phase transitions , Thin films of other inorganic compounds

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