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J-GLOBAL ID:200902265452760229   Reference number:04A0659434

Evolution of an amorphous silicon network from silicon paracrystallites studied by spectroscopic ellipsometry

分光偏光解析法によるシリコンパラ結晶粒からの非晶質シリコンネットワークの発展の研究
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Volume: 69  Issue: 23  Page: 235204.1-235204.5  Publication year: Jun. 2004 
JST Material Number: D0746A  ISSN: 1098-0121  CODEN: PRBMDO  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Structure of amorphous semiconductors  ,  Semiconductor thin films 

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