Art

J-GLOBAL ID：200902265516324940   Reference number：06A0765568

Platinum Micro-Hotplates on Thermal Insulated Structure for Micro-Thermoelectric Gas Sensor

マイクロ熱電ガスセンサのための断熱構造上のプラチナ・マイクロホットプレート

Author (6)： HOULET Lionel Fabrice (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya, JPN) ,  TAJIMA Kazuki (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya, JPN) ,  SHIN Woosuck (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya, JPN) ,  ITOH Toshio (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya, JPN) ,  IZU Noriya (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya, JPN) ,  MATSUBARA Ichiro (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya, JPN)
Material： 電気学会論文誌 E  (IEEJ Transactions on Sensors and Micromachines)
Volume： 126  Issue： 10  Page： 568-572  Publication year： Oct. 01, 2006 
JST Material Number： L3098A  ISSN： 1341-8939  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *gas sensor ,...
Semi thesaurus term： metal plate ,...

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JST classification (2)： Analytical instruments  (CC02020S) ,  Manufacturing technology of solid-state devices  (NC03030V)

Reference (12)：

• (1) R. P. Manginell, D. A. Rosato, D. A. Benson, and G.. C. Frye-Mason : “Finite element modeling of a microhotplate for microfluidic applications”, MSM99, pp. 663-666 (1999)
• (2) M. Parameswaran, A. M. Robinson, D. L. Blackburn, M. Gaitan, and J. Geist : “Micromachined thermal radiation emitter from a commercial CMOS process”, IEEE Elec. Dev. Let., Vol. 12, pp. 57-59 (1991)
• (3) D. N. Pagonis, G. Kaltsas, and A. G. Nassiopoulou : “Fabrication and testing of an integrated thermal flow sensor employing thermal isolation by a porous silicon membrane over an air cavity”, J. Micromech. Microeng., Vol. 14, pp. 793-797 (2004)
• (4) J. S. Suehle, R. E. Cavicchi, M. Gaitan, and S. Semancik : “Tin oxide gas ensor fabricated using CMOS micro-hotplates and in-situ processing”, IEEE Elec. Dev. Let., Vol. 14, pp. 118-120 (1993)
• (5) I. Simon, N. Bârsan, M. Bauer, and U. Weimar : “Micromachined metal oxide gas sensors: opportunities to improve sensor performance”, Sensors and Actuators, B, Vol. 73, pp. 1-26 (2001)

Terms in the title (4)： ガスセンサ ,  断熱構造 ,  プラチナ ,  ホットプレート