Art

J-GLOBAL ID：200902266459307771   Reference number：09A0538957

Synthesis and characterization of pure-silica-zeolite Beta low-k thin films

純シリカゼオライトベータ低k薄膜の合成及びキャラクタリゼーション

Author (6)： CHEN Yanli (State Key Lab. of Inorganic Synthesis and Preparative Chemistry, Coll. of Chemistry, Jilin Univ., Changchun 130012, CHN) ,  ZHU Guangshan (State Key Lab. of Inorganic Synthesis and Preparative Chemistry, Coll. of Chemistry, Jilin Univ., Changchun 130012, CHN) ,  PENG Ye (State Key Lab. of Inorganic Synthesis and Preparative Chemistry, Coll. of Chemistry, Jilin Univ., Changchun 130012, CHN) ,  BI Hai (State Key Lab. of Supramolecular Structure and Materials, Coll. of Chemistry, Jilin Univ., Changchun 130012, CHN) ,  FENG Jing (State Key Lab. on Integrated Optoelectronics, Coll. of Electronic Sci. and Engineering, Jilin Univ., Changchun ...) ,  QIU Shilun (State Key Lab. of Inorganic Synthesis and Preparative Chemistry, Coll. of Chemistry, Jilin Univ., Changchun 130012, CHN)
Material： Microporous and Mesoporous Materials  (Microporous Mesoporous Mater)
Volume： 123  Issue： 1-3  Page： 45-49  Publication year： Jul. 01, 2009 
JST Material Number： E0642C  ISSN： 1387-1811  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *permittivity ,  *thin film ,  chemical synthesis ,  *characterization ,  *synthetic zeolite ,  wafer ,  semiconductor material ,  hydrogen fluoride ,  scanning electron microscope ,  X-Ray Diffraction ,  dielectric loss ,  Elastic Modulus ,  hardness ,  ICP-AES analysis ,  ellipsometry ,  microelectronics ,  insulating film ,  aliphatic alcohol ,  inorganic acid ester ,  *silicon dioxide ,  Si wafer
Semi thesaurus term： *silica

JST classification (2)： Adsorbents  (YB03000W) ,  Synthetic minerals  (CD01040K)

Substance index (3)： 1-Propanol ,  Tetraethylammonium hydroxide ,  Tetraethoxysilane

Terms in the title (2)： 薄膜 ,  キャラクタリゼーション