SELAX Technology for Poly-Si TFTs Integrated with Amorphos-Si TFTs

KAITOH T.; MIYAZAWA T.; MIYAKE H.; NODA T.; SAKAI T.; OWAKU Y.; SAITOH T.

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J-GLOBAL ID：200902266687522682 Reference number：08A0102510

SELAX Technology for Poly-Si TFTs Integrated with Amorphos-Si TFTs

非晶質ケイ素TFTをもつ多結晶ケイ素TFT集積化のためのSELAX技術

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Material：
Volume： 14th Issue： Vol.2 Page： 481-484 Publication year： 2007
JST Material Number： L4269A ISSN： 1883-2490 Document type： Proceedings
Article type：短報 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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