Investigation of thermoelectric hydrogen sensor based on SiGe film

QIU F; MATSUMIYA M; SHIN W; IZU N; MURAYAMA N

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J-GLOBAL ID：200902266699505171 Reference number：03A0689875

Investigation of thermoelectric hydrogen sensor based on SiGe film

SiGe膜に基づく熱電水素センサの検討

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Author (5)： , , , ,
Material：
Volume： B94 Issue： 2 Page： 152-160 Publication year： Sep. 01, 2003
JST Material Number： T0967A ISSN： 0925-4005 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Analytical instruments , Semiconductor thin films

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