Art
J-GLOBAL ID：200902267710928850   Reference number：06A0932619

Cu-CMPにおけるパッド溝形状・物性とその研磨特性

Author (2)：
KOBAYASHI TOSHIHIRO

About KOBAYASHI TOSHIHIRO

(日本ミクロコーティング)

About 日本ミクロコーティング

, 
WATANABE JUN

About WATANABE JUN

(日本ミクロコーティング)

About 日本ミクロコーティング


Material：
精密工学会大会学術講演会講演論文集  (精密工学会大会シンポジウム資料集)

About 精密工学会大会学術講演会講演論文集


Volume： 2006  Issue： 秋季(CD-ROM)  Page： G07  Publication year： Sep. 04, 2006 
JST Material Number： Y0914A  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*polishing(machining)

About polishing(machining)

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*CMP

About CMP

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Grinding 
(QC03000R)

About Grinding

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
Cu

About Cu

, 
CMP

About CMP

, 
パッド

About パッド

, 
溝形状

About 溝形状

, 
物性

About 物性

, 
研磨特性

About 研磨特性


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