Art

J-GLOBAL ID：200902267717699333   Reference number：05A1022896

Air Flow in Square Quartz Plate Spin Cleaner

矩形石英板回転クリーナにおける空気流

Author (6)： HABUKA Hitoshi (Yokohama National Univ., Yokohama, JPN) ,  PAN Hairong (Yokohama National Univ., Yokohama, JPN) ,  FUJITA Ko (Pre-Tech Co., Ltd., Tokyo, JPN) ,  KATO Masayuki (Pre-Tech Co., Ltd., Shizuoka, JPN) ,  TAKEUCHI Takashi (Yokohama National Univ., Yokohama, JPN) ,  AIHARA Masahiko (Yokohama National Univ., Yokohama, JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 44  Issue： 11  Page： 8182-8185  Publication year： Nov. 15, 2005 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *cleaning device ,...
Semi thesaurus term： ウォータマーク

   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=05A1022896&from=J-GLOBAL&jstjournalNo=G0520B") }}

JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Reference (6)：

• 1) T. Hattori, T. Osaka, K. Saga and H. Kuniyasu: J. Electrochem. Soc. 145 (1998) 3278.
• 2) H. Habuka, M. Mayusumi, N. Tate and M. Katayama: J. Cryst. Growth 151 (1995) 375.
• 3) Y. Sato, T. Tamura and T. Ohmine: Ext. Abstr., 1992 Int. Conf. Solid State Devices and Materials 1992, p. 20.
• 4) G. Luo, S. P. Vanka and N. Glumac: Int. J. Heat Mass Transfer 47 (2004) 4979.
• 5) S. V. Patankar: Numerical Heat Transfer and Fluid Flow (McGraw-Hill, New York, 1980).

Terms in the title (3)： 矩形 ,  石英 ,  空気流