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J-GLOBAL ID:200902267729023149   Reference number:03A0630685

Three-dimensional Microstructure Fabrication with Aluminum Anodizing, Laser Irradiation, and Electrodeposition

アルミニウム陽極処理,レーザ照射および電着による三次元微細構造作製
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Volume: 150  Issue:Page: C567-C572  Publication year: Sep. 2003 
JST Material Number: C0285A  ISSN: 1945-7111  CODEN: JESOAN  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Electrode process  ,  Manufacturing technology of solid-state devices 
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