Visual Inspection of Pattern Defect Based on Self-reference

ASAMI TETSUYA; WADA TOSHIKAZU; SAKAI KAORU; MAEDA SHUNJI

Art

J-GLOBAL ID：200902269478264071 Reference number：09A0392348

Visual Inspection of Pattern Defect Based on Self-reference

自己参照に基づくパターン欠陥検査法

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Material：
Volume： 2009 Issue： 29(CVIM-166) Page： 287-292 Publication year： Mar. 06, 2009
JST Material Number： Z0031B ISSN： 0919-6072 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Quality inspection , Graphic and image processing in general , Pattern recognition

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