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J-GLOBAL ID:200902272316246895   Reference number:04A0255505

Quantitative Analysis of Strain in Silicon Crystals Using X-ray Pendelloesung Oscillations

X線Pendelloesung振動を利用したシリコン結晶内歪の定量的解析
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Volume: 43  Issue:Page: 841-842  Publication year: Feb. 15, 2004 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 短報  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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X-ray diffraction methods  ,  Lattice defects in semiconductors 
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