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J-GLOBAL ID:200902273171991577   Reference number:07A0474245

Precise control of dry etching for nanometer scale air-hole arrays in two-dimensional GaAs/AlGaAs photonic crystal slabs

二次元GaAs/AlGaAsフォトニック結晶スラブのナノメータスケールの空気孔アレイの精密なドライエッチング制御
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Material:
Volume: 275  Issue:Page: 257-267  Publication year: Jul. 01, 2007 
JST Material Number: A0678B  ISSN: 0030-4018  Document type: Article
Article type: 短報  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Quantum optics in general  ,  Optical devices in general  ,  Manufacturing technology of solid-state devices 

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