Art
J-GLOBAL ID：200902273171991577   Reference number：07A0474245

Precise control of dry etching for nanometer scale air-hole arrays in two-dimensional GaAs/AlGaAs photonic crystal slabs

二次元GaAs/AlGaAsフォトニック結晶スラブのナノメータスケールの空気孔アレイの精密なドライエッチング制御
Author (10)：
IKEDA Naoki

About IKEDA Naoki

(Center for Tsukuba Advanced Res. Alliance, Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, JPN)

About Center for Tsukuba Advanced Res. Alliance, Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, JPN

, 
IKEDA Naoki

About IKEDA Naoki

(National Inst. of Advanced Industrial Sci. and Technol., Tsukuba 305-8568, JPN)

About National Inst. of Advanced Industrial Sci. and Technol., Tsukuba 305-8568, JPN

, 
SUGIMOTO Yoshimasa

About SUGIMOTO Yoshimasa

(Center for Tsukuba Advanced Res. Alliance, Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, JPN)

About Center for Tsukuba Advanced Res. Alliance, Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, JPN

, 
SUGIMOTO Yoshimasa

About SUGIMOTO Yoshimasa

(National Inst. of Advanced Industrial Sci. and Technol., Tsukuba 305-8568, JPN)

About National Inst. of Advanced Industrial Sci. and Technol., Tsukuba 305-8568, JPN

, 
WATANABE Yoshinori

About WATANABE Yoshinori

(Center for Tsukuba Advanced Res. Alliance, Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, JPN)

About Center for Tsukuba Advanced Res. Alliance, Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, JPN

, 
OZAKI Nobuhiko

About OZAKI Nobuhiko

(Center for Tsukuba Advanced Res. Alliance, Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, JPN)

About Center for Tsukuba Advanced Res. Alliance, Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, JPN

, 
TAKATA Yoshiaki

About TAKATA Yoshiaki

(Center for Tsukuba Advanced Res. Alliance, Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, JPN)

About Center for Tsukuba Advanced Res. Alliance, Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, JPN

, 
TANAKA Yu

About TANAKA Yu

(Fujitsu Laboratories Ltd., Atsugi 243-0197, JPN)

About Fujitsu Laboratories Ltd., Atsugi 243-0197, JPN

, 
INOUE Kuon

About INOUE Kuon

(Chitose Inst. of Sci. and Technol., Chitose 066-8655, JPN)

About Chitose Inst. of Sci. and Technol., Chitose 066-8655, JPN

, 
ASAKAWA Kiyoshi

About ASAKAWA Kiyoshi

(Center for Tsukuba Advanced Res. Alliance, Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, JPN)

About Center for Tsukuba Advanced Res. Alliance, Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, JPN


Material：
Optics Communications  (Opt Commun)

About Optics Communications


Volume： 275  Issue： 1  Page： 257-267  Publication year： Jul. 01, 2007 
JST Material Number： A0678B  ISSN： 0030-4018  Document type： Article
Article type： 短報  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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*photonic band gap

About photonic band gap

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
pressure dependence

About pressure dependence

,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Quantum optics in general 
(BD04010X)

About Quantum optics in general

,  Optical devices in general 
(BD06010L)

About Optical devices in general

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
GaAs

About GaAs

, 
AlGaAs

About AlGaAs

, 
フォトニック結晶

About フォトニック結晶

, 
スラブ

About スラブ

, 
空気孔

About 空気孔

, 
アレイ

About アレイ

, 
ドライエッチング

About ドライエッチング


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