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J-GLOBAL ID:200902274295681947   Reference number:03A0485173

超音波洗浄槽の結合振動モードの有限要素シミュレーション

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Volume: 59  Issue:Page: 363-369  Publication year: Jul. 01, 2003 
JST Material Number: G0162A  ISSN: 0369-4232  CODEN: NIOGAH  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Propagation of vibrations  ,  Manufacturing technology of solid-state devices 
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