Art

J-GLOBAL ID：200902276960141250   Reference number：07A0319752

Effect of grain size and pores on the dielectric constant of nanocrystalline diamond films

ナノ結晶ダイヤモンド膜の誘電定数に及ぼす粒径と細孔の影響

Author (7)： WANG Z. L. (Beijing National Lab. for Condensed Matter Physics, Inst. of Physics, Chinese Acad. of Sciences, Beijing 100080, CHN) ,  LI J. J. (Beijing National Lab. for Condensed Matter Physics, Inst. of Physics, Chinese Acad. of Sciences, Beijing 100080, CHN) ,  SUN Z. H. (Beijing National Lab. for Condensed Matter Physics, Inst. of Physics, Chinese Acad. of Sciences, Beijing 100080, CHN) ,  LI Y. L. (Beijing National Lab. for Condensed Matter Physics, Inst. of Physics, Chinese Acad. of Sciences, Beijing 100080, CHN) ,  LUO Q. (Beijing National Lab. for Condensed Matter Physics, Inst. of Physics, Chinese Acad. of Sciences, Beijing 100080, CHN) ,  GU C. Z. (Beijing National Lab. for Condensed Matter Physics, Inst. of Physics, Chinese Acad. of Sciences, Beijing 100080, CHN) ,  CUI Z. (Rutherford Appleton Lab., Central Microstructure Facility, Chilton, Didcot, Oxon Ox11 0QX, GBR)
Material： Applied Physics Letters  (Appl Phys Lett)
Volume： 90  Issue： 13  Page： 133118-133118-3  Publication year： Mar. 26, 2007 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： microcrystal ,...
Semi thesaurus term： forbidden band ,...

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JST classification (2)： Thin films in general  (BK14010X) ,  Dielectrics in general  (BM05010F)

Substance index (1)： Methane

Terms in the title (4)： ナノ結晶ダイヤモンド膜 ,  誘電定数 ,  粒径 ,  細孔