Surface Evolution during Focused Ion Beam Micro-Machining in (001) Plane of Single-Crystalline Ni and Amorphous Nickel Alloy

HOSOKAWA Hiroyuki; NAKAJIMA Takeshi; SHIMOJIMA Koji; MABUCHI Mamoru

Art

J-GLOBAL ID：200902277367529176 Reference number：06A0073366

Surface Evolution during Focused Ion Beam Micro-Machining in (001) Plane of Single-Crystalline Ni and Amorphous Nickel Alloy

Ni単結晶の(001)面およびNi非晶質合金の集束イオンビームマイクロ加工における表面の変化

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Material：
Volume： 46 Issue： 10 Page： 2295-2297 Publication year： Oct. 20, 2005
JST Material Number： G0668A ISSN： 1345-9678 Document type： Article
Article type：短報 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Surface structure of metals , Irradiational changes of metals , Manufacturing technology of solid-state devices

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