Art
J-GLOBAL ID：200902279166282990
Reference number：05A0341002
Effect of AlN Film Thickness and Top Electrode Materials on Characteristics of Thin-Film Bulk Acoustic-Wave Resonator Devices
薄膜バルク音波共振器デバイスの特性に及ぼすAlN膜厚と最上部電極材料の影響
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Author (3)：
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Material：
Volume：
44
Issue：
3
Page：
1397-1402
Publication year：
Mar. 15, 2005
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Resonator
Terms in the title (6)：
Terms in the title
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