Art
J-GLOBAL ID：200902279966628134   Reference number：07A0666590

Resonator combined with a piezoelectric actuator for chemical analysis by force microscopy

力顕微鏡による化学分析用の圧電アクチュエータと組合わせた共振器
Author (5)：
KAWAI Yusuke

About KAWAI Yusuke

(Graduate School of Engineering, Tohoku Univ., Sendai 980-8579 Japan)

About Graduate School of Engineering, Tohoku Univ., Sendai 980-8579 Japan

, 
ONO Takahito

About ONO Takahito

(Graduate School of Engineering, Tohoku Univ., Sendai 980-8579 Japan)

About Graduate School of Engineering, Tohoku Univ., Sendai 980-8579 Japan

, 
ESASHI Masayoshi

About ESASHI Masayoshi

(Graduate School of Engineering, Tohoku Univ., Sendai 980-8579 Japan)

About Graduate School of Engineering, Tohoku Univ., Sendai 980-8579 Japan

, 
MEYER Ernst

About MEYER Ernst

(Dep. of Physics, Univ. of Basel, CHE)

About Dep. of Physics, Univ. of Basel, CHE

, 
GERBER Christoph

About GERBER Christoph

(NCCR National Center of Competence for Nanoscience, Univ. of Basel, CHE)

About NCCR National Center of Competence for Nanoscience, Univ. of Basel, CHE


Material：
Review of Scientific Instruments  (Rev Sci Instrum)

About Review of Scientific Instruments


Volume： 78  Issue： 6  Page： 063709  Publication year： Jun. 2007 
JST Material Number： D0517A  ISSN： 0034-6748  CODEN： RSINAK  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*force microscope

About force microscope

,...
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PZT

About PZT

,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Microscopy determination of structures 
(BK01040E)

About Microscopy determination of structures

,  Electric control equipment 
(IC02020Y)

About Electric control equipment

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
力顕微鏡

About 力顕微鏡

, 
化学分析

About 化学分析

, 
圧電アクチュエータ

About 圧電アクチュエータ

, 
共振器

About 共振器


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