Nanomachining of Silicon Surface Using Atomic Force Microscope With Diamond Tip

KAWASEGI Noritaka; TAKANO Noboru; OKA Daisuke; MORITA Noboru; YAMADA Shigeru; KANDA Kazutaka; TAKANO Shigeto; OBATA Tsutomu; ASHIDA Kiwamu

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J-GLOBAL ID：200902280203562092 Reference number：06A0640334

Nanomachining of Silicon Surface Using Atomic Force Microscope With Diamond Tip

ダイヤモンドチップを有する原子間力顕微鏡を用いたシリコン表面のナノメータ加工

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Material：
Volume： 128 Issue： 3 Page： 723-729 Publication year： Aug. 2006
JST Material Number： C0657A ISSN： 1087-1357 CODEN： JMSEFK Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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