Fine Characterization of Plasma-Polymerized Films from a Methane/Air Mixture

MORI Masaru; IZUMI Hirokazu; NAKAGAWA Kazuharu; NAKAMOTO Tsuyoshi; MORI Takeshi; KAWASHIMO Yasushi; UEDA Yasukiyo

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J-GLOBAL ID：200902280442331639 Reference number：06A0631213

Fine Characterization of Plasma-Polymerized Films from a Methane/Air Mixture

メタン/空気混合物からのプラズマ重合フィルムの微細特性評価

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Material：
Volume： 101 Issue： 5 Page： 3408-3414 Publication year： Sep. 05, 2006
JST Material Number： C0467A ISSN： 0021-8995 CODEN： JAPNAB Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Applications of plasma

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