High-Speed Optical Microscanner Driven with Resonation of Lam Waves Using Pb(Zr,Ti)O<sub>3</sub> Thick Films Formed by Aerosol Deposition

AKEDO Jun; LEBEDEV Maxim; SATO Harumichi; PARK Jaehyuk

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J-GLOBAL ID：200902282641669870 Reference number：05A0996497

High-Speed Optical Microscanner Driven with Resonation of Lam Waves Using Pb(Zr,Ti)O₃ Thick Films Formed by Aerosol Deposition

エーロゾル堆積により作製したPb(Zr,Ti)O₃厚膜を用いてLam波の分解能で駆動する高速光マイクロスキャナ

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Material：
Volume： 44 Issue： 9B Page： 7072-7077 Publication year： Sep. 30, 2005
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Other optical devices , Piezoelectric devices

Reference (18)：

1) M. Bayer: Proc. SPIE 4711 (2002) 4557.
2) H. Urey: Proc. SPIE 4773 (2002) 27.
3) H. Schenk, P. Durr, D. Kunze, H. Lakner and H. Kuck: Proc. IEEE 13th Annual Int. Conf. Micro Electro Mechanical Systems (MEMS) (2000) p. 473.
4) D. Dickensheets and G. KiNo: Proc. SPIE 3009 (1997) 141.
5) K. Yamada and T. Kuriyama: Proc. of MEMS 98 (1998) p. 110.

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High-Speed Optical Microscanner Driven with Resonation of Lam Waves Using Pb(Zr,Ti)O3 Thick Films Formed by Aerosol Deposition

High-Speed Optical Microscanner Driven with Resonation of Lam Waves Using Pb(Zr,Ti)O₃ Thick Films Formed by Aerosol Deposition