Art

J-GLOBAL ID：200902284413781248   Reference number：06A0642987

Measurement of output voltage of aluminum nitride thin film as a pressure sensor at high temperature

高温での圧力センサとして,窒化アルミニウム薄膜の出力電圧の測定

Author (7)： KISHI Kazushi (National Inst. of Advanced Industrial Sci. and Technol., On-site Sensing and Diagnosis Res. Lab., 807 Shukumachi ...) ,  OOISHI Yasunobu (National Inst. of Advanced Industrial Sci. and Technol., On-site Sensing and Diagnosis Res. Lab., 807 Shukumachi ...) ,  NOMA Hiroaki (National Inst. of Advanced Industrial Sci. and Technol., On-site Sensing and Diagnosis Res. Lab., 807 Shukumachi ...) ,  USHIJIMA Eizo (National Inst. of Advanced Industrial Sci. and Technol., On-site Sensing and Diagnosis Res. Lab., 807 Shukumachi ...) ,  UENO Naohiro (National Inst. of Advanced Industrial Sci. and Technol., On-site Sensing and Diagnosis Res. Lab., 807 Shukumachi ...) ,  AKIYAMA Morito (National Inst. of Advanced Industrial Sci. and Technol., On-site Sensing and Diagnosis Res. Lab., 807 Shukumachi ...) ,  TABARU Tatsuo (National Inst. of Advanced Industrial Sci. and Technol., On-site Sensing and Diagnosis Res. Lab., 807 Shukumachi ...)
Material： Journal of the European Ceramic Society  (J Eur Ceram Soc)
Volume： 26  Issue： 15  Page： 3425-3430  Publication year： 2006 
JST Material Number： E0801B  ISSN： 0955-2219  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： *pressure sensor ,...
Semi thesaurus term： Inconel 600

   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=06A0642987&from=J-GLOBAL&jstjournalNo=E0801B") }}

JST classification (1)： Measuring methods and instruments of force,work load,pressure,friction  (AD05050V)

Terms in the title (4)： 圧力センサ ,  窒化アルミニウム ,  薄膜 ,  出力電圧